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Tantalum Rings & Tantalum Target

As a special electronic material with high added values, semiconductor targets are mainly used in microelectronics, display, memory, optical coating and other industries to sputter various thin film materials for cutting-edge technology.

Product Description

產(chǎn)品用途：

作為一種具有高附加價(jià)值的特種電子材料，主要使用在微電子，顯示器，存儲器以及光學(xué)鍍膜等產(chǎn)業(yè)，用以濺射用于尖端技術(shù)的各種薄膜材料。

Application:

As a special electronic material with high added value, it is mainly used in microelectronics, display, memory and optical coating industries to sputter various thin film materials for cutting-edge technology.

產(chǎn)品性能參數(shù)/Product Property Parameters：

牌號 Grade		DTa1	DTa2	DTa3
化學(xué)成分 Chemical Compositions （%，不大于/max）	Ta	≥99.95	≥99.99	≥99.995
	C	0.01	0.003	0.002
	N	0.005	0.005	0.004
	H	0.0015	0.0015	0.001
	O	0.015	0.01	0.005
	Nb	0.02	0.005	0.002
	Fe	0.005	0.0005	0.0001
	Ti	0.002	0.001	0.0005
	W	0.005	0.001	0.001
	Mo	0.005	0.001	0.001
	Si	0.005	0.001	0.0001
	Ni	0.002	0.0001	0.0001
其他性能 Other Properties	平均晶粒尺寸 Average Grain Size (μm)	≤100um
	粗糙度粗糙度 Roughness (Ra, μm)	Ra0.8-1.2
	平面度平面度 Flatness （mm）	≤0.10％

尺寸Sizes:

形狀

Shape

厚度

Thickness（mm）

寬度

Width（mm）

長度

Length（mm）

直徑

Diameter（mm）

圓形Round

3-25

≤450

方形Square

3-25

≤600

≤2000

注：如有特殊要求，雙方具體商定。

Note: Special requirements will be agreed upon by the supplier and buyer.

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